# Jiaotong University Campus, Nano Center, Instrument Location: Laboratory 137, 1st Floor, Solid State Electronic Systems Building

OXIDATION & DIFFUSION FURNACES
Brand Model: Senji SJ-CA1200-D4
Instrument expert: Professor Liu Bocun (ext. 52994)
Equipment management personnel: Mr. Lin Shengqin (extension 55668, 55610)
Instrument location: Room 121, Solid State Electronic Systems Building

Photomask Production System Graphic Generation System Instrument Expert: Prof. Li Peiwen, ext. 54210 Instrument Consulting and Operation Services: Mr. Cai Qingxiang, Mr. Huang Guohua Buildings 139 and 118

III-V MOLECULAR BEAM EPITAXY SYSTEM Brand model: Veeco Modular GEN II solid source III-V MBE Instrument expert: Professor Lin Shengdi extension 31240 mailbox sdlin@mail.nctu.edu.tw Instrument consultation and operation service: Wu Chujun…

High Vacuum Deposition System Sputtering System A Sputtering System B

Atomic Layer Chemical Vapor Deposition System Solid State Electronic System Building Room 129 Instrument Expert: Professor Zhao Tiansheng Extension: 31367 Technician: Mr. Zhan Jiaqi Technician Extension: 55662(O), 55616(L)

Code: SEMI00001300 Field: Nano Process Name: Thermal Evaporation Coater Thermal Evaporation Coater Dual E-Gun Evaporation System A Dual E-Gun Evaporation System A Dual E-Gun Evaporation System B Gun Evaporation System B) Instrument expert: Zheng Yuting...

高密度活性離子蝕刻系統 (High Density Plasma Reactive Ion Etching System, HDP-RIE) 矽深蝕刻系統 (Si Deep-RIE) 矽淺蝕刻系統 (Shallow Si RIE) 儀器位置：固態電子系統大樓 1樓116…

Instrument location: Room 213, Engineering Building Six. Instrument experts: Professor Wu Yaoquan extension 31555, Professor Cui Bingyue extension 31570; Instrument and equipment management personnel: Ms. Liu Yueen extension 55658/55368

Instrument location: Laboratory in Room 212, 2/F, Engineering Building 6 (TEL: 55337) Instrument expert: Prof. Tan Zhishan, ext. 54146; Instrument consultation and operation service: Ms. Fan Xiulan, ext. 55337/55672

Instrument location: Dielectric Material Reactive Ion Etching System A (Dielectric Material RIE-400iP) Dielectric Material Reactive Ion Etching System B (Dielectric Materials Reactive Ion Etching System, RIE…

Instrument location: Laboratory 116, 1st Floor, Solid State Electronic System Building (TEL: 55666) Instrument Expert: Prof. Lin Hongzhi, ext. 54193; Instrument consultation and operation service: Mr. Lai Wenyan, ext. 55606/55616

Low Pressure Chemical Vapor Deposition (LPCVD) Brand Model: SJ-10301001-1 Instrument Expert: Professor Liu Bocun, ext. 52994 Instrument consultation and operation service: Mr. Lai Wenyan, ext. 55606, 55616 Instrument location: Experiment 127, 1st Floor, Solid State Electronic System Building Room ext 55616