Thermal Evaporator & Glove Box Integration System (Thermal Evaporator & Glove Box)
# Jiaotong University Campus, Thermal Evaporator + Glove Box (TEG), only open to entrusted operation, fee-based use, instrument location: Room R224, Nano Center
Semiconductor Process
Flip-chip Bonder
# Jiaotong University Campus, Smart Equipment Technology (SET), ACCμRA 100, only open for commissioned operation, chargeable use, instrument location: Room R135, Nano Center
Multi-cavity magnetron plasma thin film system Sputter C
# Jiaotong University Campus, KD-Sputter-Load luck, commissioned operation, chargeable use, instrument location: Nano Center 3F Room 304 (clean room)