Nanofabrication

# Jiaotong University Campus, Nano Center, Instrument Location: Laboratory 137, 1st Floor, Solid State Electronic Systems Building

OXIDATION & DIFFUSION FURNACES
Brand Model: Senji SJ-CA1200-D4
Instrument expert: Professor Liu Bocun (ext. 52994)
Equipment management personnel: Mr. Lin Shengqin
(Ext. 55668, 55610)
Instrument location: Room 121, Solid State Electronic Systems Building

Laser Pattern Generator
Graphics Generation System

Instrument expert: Professor Li Peiwen
ext 54210

Instrument consulting and operation services: Mr. Cai Qingxiang, Mr. Huang Guohua
Mr. Huang Guohua (ext. 55659, 55667, 55616)
Mr. Cai Qingxiang (ext. 55605, 55616)

Instrument location: Room 139 and 118, Solid State Electronic Systems Building

III-V MOLECULAR BEAM EPITAXY SYSTEM
Brand Model: Veeco Modular GEN II solid source III-V MBE

Instrument expert: Professor Lin Shengdi
ext 31240
Mailbox sdlin@mail.nctu.edu.tw

Instrument consulting and operation services: Miss Wu Chujun
Extension 54248, 55665
E-mail isabelwu@nctu.edu.tw

Instrument location: Room R110, 1st Floor, Nano Center

High Vacuum Deposition System
Sputtering System A
Sputtering System B
Instrument Location: Laboratory, 3rd Floor, Solid State Electronic Systems Building

Atomic Layer Chemical Vapor Deposition System
Room 129, Solid State Electronic Systems Building
Instrument expert: Professor Zhao Tiansheng
Ext: 31367
Technician: Mr. Zhan Jiaqi
Technician extension: 55662(O), 55616(L)

Code: SEMI00001300

Field: Nanofabrication

Name: Thermal Evaporation System
Thermal Evaporation Coater
Dual E-Gun Evaporation System A
Dual E-Gun Evaporation System B

Instrument expert: Professor Zheng Yuting (ext. 54169)

Equipment administrators: Miss Ni Yuezhen, Mr. Lin Shengqin
Extensions 55669(O), 55668(O), 55608(L)

Instrument Location: 3rd Floor, Solid State Electronics Building

High Density Plasma Reactive Ion Etching System (HDP-RIE)
Silicon deep etching system (Si Deep-RIE)
Shallow Si RIE
Instrument location: Laboratory 116 & 127, 1st Floor, Solid State Electronics System Building

Instrument location: Room 213, Engineering Sixth Building
Instrument experts: Professor Wu Yaoquan extension 31555, Professor Cui Bingyue extension 31570;
Equipment management personnel: Ms. Liu Yueen extension 55658/55368

Instrument location: Laboratory, Room 212, 2nd Floor, Building 6 (TEL: 55337)
Instrument expert: Professor Tan Zhishan, ext. 54146; Instrument consultation and operation service: Miss Fan Xiulan, ext. 55337/55672