Molecular Beam Epitaxy System MBE System
# Jiaotong University Campus, SVT Associates, Model 35-V-2, commissioned operation, chargeable use, instrument location: Room 657, Section 3 Building
Vapor Deposition
Plasma Assisted Chemical Vapor Deposition System PECVD
Instrument location: Laboratory 116, 1st Floor, Solid State Electronic Systems Building (TEL: 55666)
Instrument expert: Professor Lin Hongzhi ext. 54193; Instrument consultation and operation service: Mr. Lai Wenyan ext. 55606/55616
Low pressure chemical vapor deposition system LPCVD
Low Pressure Chemical Vapor Deposition (LPCVD)
Brand Model: SJ-10301001-1
Instrument expert: Liu Bocun
Professor ext. 52994
Instrument consulting and operation services: Mr. Lai Wenyan
Extension 55606, 55616
Instrument Location: 127, 1st Floor, Solid State Electronic Systems Building
Lab Ext 55616